Commercial SOI sensor technology
E. van Zeijl (TNO)
R. Schmits (TNO)
J. H. van den Berg (TNO)
P. J. Harmsma (TNO)
W. J. Westerveld (TU Delft - Dynamics of Micro and Nano Systems, TNO)
M. Lagioia (TNO)
P. Bodis (TNO)
R. P. Ebeling (TNO)
R. A. Nieuwland (TNO)
S. Yang
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Abstract
We present a platform for the deployment of SOI based sensors in commercial
applications. The platform is designed from a systems perspective and includes all
aspects of a SOI sensor system, including sensor head itself, the communications
infrastructure and a customized interrogation system.