Ptychography with multiple wavelength illumination

Journal Article (2019)
Author(s)

Xukang Wei (TU Delft - ImPhys/Optics)

Paul Urbach (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
Copyright
© 2019 X. Wei, Paul Urbach
DOI related publication
https://doi.org/10.1364/OE.27.036767
More Info
expand_more
Publication Year
2019
Language
English
Copyright
© 2019 X. Wei, Paul Urbach
Research Group
ImPhys/Optics
Issue number
25
Volume number
27
Pages (from-to)
36767-36789
Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Abstract

For performing phase retrieval in the extreme ultraviolet (EUV) regime more efficiently, developing polychromatic ptychography is desirable. As an alternative to the existing ptychographic information multiplexing (PIM) method, we present an another scheme where all monochromatic exit waves are expressed in terms of the amplitude of the transmission function and the thickness function of the object. Our proposed algorithm is a gradient based method and its validity is studied numerically. In addition, the sampling issue which appears in the polychromatic ptychography scheme and its influence to the reconstruction quality are discussed.

Files

Oe_27_25_36767.pdf
(pdf | 4.94 Mb)
License info not available