Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

Journal Article (2015)
Author(s)

V Podgursky (External organisation)

A Bogatov (External organisation)

V Sedov (External organisation)

I Sildos (External organisation)

A Mere (External organisation)

M Viljus (External organisation)

JG Buijnsters (TU Delft - Micro and Nano Engineering)

V Ralchenko (External organisation)

Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1016/j.diamond.2015.07.002
More Info
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Publication Year
2015
Language
English
Research Group
Micro and Nano Engineering
Bibliographical Note
Harvest@en
Volume number
58
Pages (from-to)
172-179

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