Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

Journal article (2015)

Authors

V Podgursky External organisation
A Bogatov External organisation
V Sedov External organisation
I Sildos External organisation
A Mere External organisation
M Viljus External organisation
J.G. Buijnsters Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
V Ralchenko External organisation
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering