Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology
Journal Article
(2015)
Author(s)
V Podgursky (External organisation)
A Bogatov (External organisation)
V Sedov (External organisation)
I Sildos (External organisation)
A Mere (External organisation)
M Viljus (External organisation)
JG Buijnsters (TU Delft - Micro and Nano Engineering)
V Ralchenko (External organisation)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1016/j.diamond.2015.07.002
To reference this document use:
https://resolver.tudelft.nl/uuid:b778e7ee-0a7c-44f5-918f-5cf33a041932
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Publication Year
2015
Language
English
Research Group
Micro and Nano Engineering
Bibliographical Note
Harvest@en
Volume number
58
Pages (from-to)
172-179
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