Shack-Hartmann reflective micro profilometer

Journal article (2017)

Authors

H. Gong Team Raf Van de Plas - Mechanical, Maritime and Materials Engineering
O.A. Soloviev Team Raf Van de Plas - Mechanical, Maritime and Materials Engineering
M.H.G. Verhaegen Team Raf Van de Plas - Mechanical, Maritime and Materials Engineering
Gleb Vdovin Team Raf Van de Plas - Mechanical, Maritime and Materials Engineering
Research Group
Team Raf Van de Plas (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2017 H. Gong, O.A. Soloviev, M.H.G. Verhaegen, Gleb Vdovin
DOI: https://doi.org/10.1117/12.2295688
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Published Date

2017

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

Team Raf Van de Plas

Abstract

We present a quantitative phase imaging microscope based on a Shack-Hartmann sensor, that directly reconstructs the optical path difference (OPD) in reflective mode. Comparing with the holographic or interferometric methods, the SH technique needs no reference beam in the setup, which simplifies the system. With a preregistered reference, the OPD image can be reconstructed from a single shot. Also, the method has a rather relaxed requirement on the illumination coherence, thus a cheap light source such as a LED is feasible in the setup. In our previous research, we have successfully verified that a conventional transmissive microscope can be transformed into an optical path difference microscope by using a Shack-Hartmann wavefront sensor under incoherent illumination. The key condition is that the numerical aperture of illumination should be smaller than the numerical aperture of imaging lens. This approach is also applicable to characterization of reflective and slightly scattering surfaces.

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