Microcolumn design for a large scan field and pixel number
Journal Article
(2009)
Author(s)
H. Weigand (External organisation)
S. Gautsch (External organisation)
W. Strohmaier (External organisation)
M. Fleischer (External organisation)
U STAUFER (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:bb491bfa-b29b-4faa-9403-08c0daffea80
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Publication Year
2009
Research Group
Micro and Nano Engineering
Issue number
6
Volume number
27
Pages (from-to)
2542-2546
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