Modelling of the Kinetics in Copper Chemical Vapour Deposition from Cu(hfac)VTMS

Journal article (1999)

Authors

MLH ter Heerdt External organisation
JJ Overdijk External organisation
PJ van der Put External organisation
J. Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)