Multi-electron-beam deflector array

Journal Article (2014)
Author(s)

A.C. Zonnevylle (TU Delft - ImPhys/Charged Particle Optics)

Carel T.H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)

CW Hagen (TU Delft - ImPhys/Charged Particle Optics)

P Kruit (TU Delft - ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2014
Research Group
ImPhys/Charged Particle Optics
Volume number
123
Pages (from-to)
140-148

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