Multi-electron-beam deflector array
Journal Article
(2014)
Author(s)
A.C. Zonnevylle (TU Delft - ImPhys/Charged Particle Optics)
Carel T.H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)
CW Hagen (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:bbe4d433-2664-493b-b61b-43e4cc5471f1
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Publication Year
2014
Research Group
ImPhys/Charged Particle Optics
Volume number
123
Pages (from-to)
140-148
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