On the Mechanisms Governing Aluminum-Mediated Solid-Phase Epitaxy of Silicon

Journal article (2009)

Authors

Y Civale Electronic Components, Technology and Materials - EEMCS
G Vastola External organisation
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
R. Mary Joy External organisation
JR Kim QN/Mol. Electronics & Devices
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials