On the Mechanisms Governing Aluminum-Mediated Solid-Phase Epitaxy of Silicon

Journal Article (2009)
Author(s)

Y Civale (TU Delft - Electronic Components, Technology and Materials)

G Vastola (External organisation)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

R. Mary Joy (External organisation)

JR Kim (TU Delft - QN/Mol. Electronics & Devices)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/DOI: 10.1007/s11664-009-0877-1
More Info
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Issue number
10
Volume number
38
Pages (from-to)
2052-2062

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