Bi-stability of micro-plates

A sensitive mechanism for differential pressure measurements

Journal article (2017)

Authors

B. Sajadi Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2017 B. Sajadi, J.F.L. Goosen, A. van Keulen
DOI
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https://doi.org/10.1063/1.5003223
Electrostatics Thermodynamics Adsorption Elastic moduli Chemical composition
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Published Date

2017

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

The electrostatic instability (pull-in) of a flat electrode in a parallel plate capacitor has been shown to be highly sensitive to external mechanical loads such as pressure. In this paper, we substantiate the possibility of prompting additional unstable configurations in such a system, with a remarkable sensitivity to the applied pressure. This additional instability has significant advantageous properties for sensing purposes. In addition to the high sensitivity and robustness of the pull-in voltage measurements, it can be adjusted so that after the unstable configuration is met, a snap-through to a new stable configuration occurs. As a result of this bi-stable behavior, the contact between the electrodes, which is the main drawback of pull-in phenomena, will be easily avoided. The results of this paper particularly suggest the suitability of this mechanism for two different methods of pressure measurements.

Files

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