Silicon nitride nanosieve membrane
Journal Article
(2004)
Author(s)
HD Tong (External organisation)
HV Jansen (External organisation)
VJ Gadgil (External organisation)
CG Bostan (External organisation)
E Berenschot (External organisation)
CJM van Rijn (TU Delft - Computational Design and Mechanics)
M Elwenspoek (External organisation)
Research Group
Computational Design and Mechanics
To reference this document use:
https://resolver.tudelft.nl/uuid:c28fbda9-8379-4414-b1b9-6292eea8e839
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Publication Year
2004
Research Group
Computational Design and Mechanics
Issue number
2
Volume number
4
Pages (from-to)
283-287
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