Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces
Journal Article
(2014)
Author(s)
V. Mohammadi (TU Delft - Electronic Components, Technology and Materials)
Negin Golshani (TU Delft - Electronic Components, Technology and Materials)
C. Mok Kai Rine (TU Delft - Electronic Components, Technology and Materials)
W.B. de Boer (TU Delft - Old - EWI Sect. ECTM)
J Derakhshandeh Kheljani (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.mee.2014.03.015
To reference this document use:
https://resolver.tudelft.nl/uuid:c2bfe926-cfab-4290-9595-189852dc4265
More Info
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Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
125
Pages (from-to)
45-50
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