Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces

Journal Article (2014)
Author(s)

Vahid Mohammadi (TU Delft - Electronic Components, Technology and Materials)

N. Golshani (TU Delft - Electronic Components, Technology and Materials)

C. Mok Kai Rine (TU Delft - Electronic Components, Technology and Materials)

Wiebe de Boer (TU Delft - Old - EWI Sect. ECTM)

J. Derakhshandeh Kheljani (TU Delft - Electronic Components, Technology and Materials)

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.mee.2014.03.015
More Info
expand_more
Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
125
Pages (from-to)
45-50

No files available

Metadata only record. There are no files for this record.