Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces

Journal article (2014)

Authors

V. Mohammadi Electronic Components, Technology and Materials - EEMCS
N. Golshani Electronic Components, Technology and Materials - EEMCS
C. Mok Kai Rine Electronic Components, Technology and Materials - EEMCS
W.B. de Boer Old - EWI Sect. ECTM
J. Derakhshandeh Kheljani Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials