Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective
Journal Article
(2009)
Author(s)
APJM Botman (TU Delft - ImPhys/Charged Particle Optics)
JJL Mulders (External organisation)
Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:c4e02f0b-2416-4084-9b38-6553b028e228
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Publication Year
2009
Research Group
ImPhys/Charged Particle Optics
Volume number
20
Pages (from-to)
372001-372001
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