Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide
Conference Paper
(2001)
Author(s)
E Connolly (TU Delft - Electronic Instrumentation)
GMO O'Halloran (External organisation)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
PJ French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:c5ea0cdb-8350-43ac-b824-37722b0ada2a
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
83-88
ISBN (print)
0-7923-7012-0
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