Deep dry etching process development for InP-based photonic crystals

R van der Heijden (External organisation)

Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)

EJ Geluk (TU Delft - Electronic Components, Technology and Materials)

RW van der Heijden (External organisation)

F Karouta (External organisation)

PAM Nouwens (External organisation)

YS Oei (TU Delft - Old - EWI Ch. Photonic Integrated Circuits)

T de Vries (TU Delft - Old - EWI Ch. Photonic Integrated Circuits)

HWM Salemink (External organisation)