Polymeric strain gauges as pressure sensors for microfabricated organ-on-chips
WF Quiros-Solano (Instituto Tecnologico de Costa Rica, TU Delft - Electronic Components, Technology and Materials)
N. Gaio (TU Delft - Electronic Components, Technology and Materials)
C. Silvestri (TU Delft - Tera-Hertz Sensing)
G. Pandraud (TU Delft - EKL Processing)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
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Abstract
Polymeric (PEDOT:PSS) strain gauges embedded in PDMS membranes fabricated using a full wafer-scale fabrication process capable of realizing reproducible small features, are reported. The devices are characterized using a customized setup, which provides mechanical stretch while dynamically reading the electrical resistance. Measurements show relative resistance changes of approximately 11% for applied pressure up to 4 kPa. The process described is tailored to fabricate pressure sensors and microelectrodes for a flexible substrate-based Organ-on-Chip platform.
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