Consistent vibration analysis of electrostatically coupled structures: application to microsystems
Conference Paper
(2003)
Author(s)
V. Rochus (External organisation)
Daniel Rixen (TU Delft - Dynamics of Micro and Nano Systems)
JC Golinval (External organisation)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:c6f671c5-1417-429b-91dd-9b370bfb51fb
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Publication Year
2003
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
509-515
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