A buried vertical filter for micro and nanoparticle filtration

Journal Article (2012)
Author(s)

SJ (extern) Li (External organisation)

C. Shen (TU Delft - Electronic Components, Technology and Materials)

Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.sna.2012.04.027
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
186
Pages (from-to)
203-209

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