Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions
Journal Article
(2000)
Author(s)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
D Brida (External organisation)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:c78b396c-38d3-455b-9ae4-d74c7f27e25b
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Volume number
85
Pages (from-to)
340-345
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