Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

Journal Article (2000)
Author(s)

Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)

D Brida (External organisation)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Volume number
85
Pages (from-to)
340-345

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