Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 1. Optical absorptivity
Journal Article
(2009)
Author(s)
F jutzi (External organisation)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
Gregory Pandraud (TU Delft - Electronic Components, Technology and Materials)
N de rooij (External organisation)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:c859abad-af02-452f-bbb0-984feb9477cc
More Info
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Publication Year
2009
Research Group
Electronic Instrumentation
Volume number
152
Pages (from-to)
119-125
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