PECVD SIC- SiO2-SIC Horizontal Slot Waveguides for Sensing Photonics devices
Conference Paper
(2010)
Author(s)
G Pandraud (TU Delft - Electronic Components, Technology and Materials)
A. Barbosa Neira (External organisation)
E Margallo Balbas (TU Delft - Electronic Instrumentation)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:c87e08b2-4d49-4f7b-a241-1b8140c44faf
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
975-978
ISBN (print)
978-1-4244-8168-2
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