On the aluminum-mediated solid-phase epitaxy of silicon at 300C
Conference Paper
(2008)
Author(s)
A. Sammak (TU Delft - Electronic Components, Technology and Materials)
Y Civale (TU Delft - Old - EWI Sect. ECTM)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:c88002e4-3ec5-4e3e-940e-cb8a93e4fd53
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
457-460
ISBN (print)
978-90-73461-56-7
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