On the aluminum-mediated solid-phase epitaxy of silicon at 300C

Sammak, A.; Civale, Y; Nanver, LK

On the aluminum-mediated solid-phase epitaxy of silicon at 300C

Conference paper (2008)

Authors

A. Sammak Electronic Components, Technology and Materials

Y Civale Old - EWI Sect. ECTM

LK Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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