Polymeric thermal microactuator with embedded silicon skeleton: Part II¿Fabrication, characterization, and application

Journal article (2008)

Authors

T Chu Duc Electronic Components, Technology and Materials - EEMCS
GK Lau Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials