Selective Aluminum CVD on SI(100) from DMAH.
Conference Paper
(1999)
Author(s)
C Bisch (External organisation)
S. Rogge (TU Delft - QN/Fysics of NanoElectronics)
T Melin (External organisation)
G.C.A.M. Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:ca5e9f14-9460-4c38-a542-46d077718ebf
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Publication Year
1999
Research Group
QN/Fysics of NanoElectronics
Pages (from-to)
141-146
ISBN (print)
1-55899-488-2
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