Selective Aluminum CVD on SI(100) from DMAH.

Conference paper (1999)

Authors

C Bisch External organisation
S. Rogge QN/Fysics of NanoElectronics
T Melin External organisation
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
Research Group
QN/Fysics of NanoElectronics
More Info
expand_more

Published Date

1999

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

QN/Fysics of NanoElectronics