Silicon micromachined vertical structures for nanoparticle separation
Doctoral Thesis
(2011)
Author(s)
C. Shen (QN/High Resolution Electron Microscopy, TU Delft - Electronic Components, Technology and Materials)
Contributor(s)
Pasqualina Sarro – Promotor
QN/High Resolution Electron Microscopy
To reference this document use:
https://resolver.tudelft.nl/uuid:cb20269b-875e-4f67-835a-bf6210440502
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Publication Year
2011
Language
English
QN/High Resolution Electron Microscopy
ISBN (print)
978-90-8570-761-5
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