Fabrication of Devices and Antennas for Millimeter-Wave and Terahertz Systems

Conference Paper (2019)
Author(s)

Choonsup Lee (California Institute of Technology)

D Gonzalez-Ovejero (CentraleSupelec-IETR UMR 6164)

M. Alonso-Del Pino (California Institute of Technology)

C Jung (California Institute of Technology)

Imran Mehdi (California Institute of Technology)

G. Chattopadhyay (California Institute of Technology)

Affiliation
External organisation
DOI related publication
https://doi.org/10.1109/IRMMW-THz.2019.8873985
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Publication Year
2019
Language
English
Affiliation
External organisation
ISBN (electronic)
9781538682852

Abstract

We have demonstrated corrugated horn antennas at 560 GHz fabricated with a deep reactive ion etching (DRIE) process on silicon. The measurement of two of the ( 2 times 2)560 GHz array antenna has shown that the return loss and directivity are 13 dB and 22 dB, respectively. All of the measured antennas had below-25 dB of the cross-polarization and symmetrical beam patterns. The silicon microfabrication technique enables us to build hundreds of horn antennas at once, allowing construction of multi-pixel heterodyne imagers and spectrometers at submillimeter wavelengths.

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