SILICON DOPING TECHNIQUES USING CHEMICAL VAPOR DOPANT DEPOSITION
Doctoral Thesis
(2009)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
Contributor(s)
L. K. Nanver – Promotor
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:cce6a808-18c8-436b-84c6-f34e2e6e7fb4
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
ISBN (print)
978-90-8570-422-5
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