Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle
Conference Paper
(2007)
Author(s)
Jia Wei (TU Delft - Electronic Components, Technology and Materials)
T Chu Duc (TU Delft - Electronic Components, Technology and Materials)
M van der Velden (TU Delft - Mechatronic Systems Design)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:ccfa1034-debd-4db7-a1b3-dc3fd24f6e8f
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
625-628
ISBN (print)
978-90-73461-49-9
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