Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

Abstract

In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.