Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

Conference paper (2017)

Authors

Y. Xin Electronic Instrumentation -

G. Pandraud EKL Processing -

A.K. van Langen-Suurling QN/Kavli Nanolab Delft - , Kavli institute of nanoscience Delft

P.J. French Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

Evanescent wave Sensing Vertical waveguide SU8 Tapered

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Published Date

2017

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.

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