Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications
Conference Paper
(2008)
Author(s)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
F jutzi (External organisation)
G Pandraud (TU Delft - Electronic Instrumentation)
NF de Rooij (External organisation)
PJ French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:cd87ca03-083c-466f-8504-ddb1b109a347
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
397-400
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