MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications
Doctoral Thesis
(2011)
Author(s)
M. Mihailovic (TU Delft - Electronic Components, Technology and Materials)
Contributor(s)
Pasqualina Sarro – Promotor
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:cdfb32a6-ea1c-431d-befd-778008c01b41
More Info
expand_more
expand_more
Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
ISBN (print)
978-90-5335-430-8
No files available
Metadata only record. There are no files for this record.