Annealing experiments on supercritical Si1-xGEx layers grown by RPCVD
Conference Paper
(1999)
Author(s)
K Grimm (External organisation)
L Vescan (External organisation)
CCG Visser (TU Delft - Electrical Engineering, Mathematics and Computer Science)
LK Nanver (TU Delft - Electrical Engineering, Mathematics and Computer Science)
H Lüth (External organisation)
Research Group
Electronic Components, Technology and Materials
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-6
Publisher
Elsevier
Event
European Materials Conference, Strasbourg (1999-05-31 - 1999-06-04), S.l.
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