Fiber-coupled displacement interferometry without periodic nonlinearity

Journal article (2011)

Authors

J.D. Ellis

A.J.H. Meskers

J.W. Spronck

R.H. Munnig Schmidt

Department

Precision and Microsystems Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)

DOI: https://doi.org/doi:10.1364/OL.36.003584

Interferometry Optical design of instruments Optical systems Metrological instrumentation Fringe analysis Instrumentation, measurement and metrology

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Published Date

12-09-2011

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Source:

Optics Letters, 36 (18), 2011

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Abstract

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinearity in both free-space and fiber-delivered variants.

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