Parameterization Models for Traceable Characterization of Planar CPW SOL Calibration Standards

Conference paper (2018)

Authors

F. Mubarak VSL Dutch Metrology Institute

V. Mascolo VSL Dutch Metrology Institute

Gert Rietveld VSL Dutch Metrology Institute

M. Spirito Electronics -

K. Daffe IEMN Institut d'Electronique de Microelectronique et de Nanotechnologie

K. Haddadi IEMN Institut d'Electronique de Microelectronique et de Nanotechnologie

Research Group

Electronics () (TU Delft)

Nanostructures EM simulation Measurement uncertainty Traceability Precision measurements Co-planar waveguide On-wafer calibration VNA

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http://resolver.tudelft.nl/uuid:d0a81e74-340c-4e78-9c0e-92ac8f8dd3da

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Published Date

2018

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

Methods for traceable characterization and uncertainty evaluation of planar I-port CPW short-open-Ioad (SOL) devices are developed. The agreement of modelling and verification measurement results greatly supports the application of the proposed parameterization models and used FEM-based EM modelling of CPW structures for traceable characterization of planar CPW-based SOL devices in the frequency range between a few kHz up to 50 GHz.

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