Stress in sputter-deposited Cr films: Infleunce of ar pressure
Journal Article
(2005)
Author(s)
S Grachev (TU Delft - OLD Surface and Interface Engineering)
F.D. Tichelaar (TU Delft - QN/High Resolution Electron Microscopy)
GCAM Janssen (TU Delft - OLD Surface and Interface Engineering)
Research Group
OLD Surface and Interface Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:d0b28791-2853-4e69-ac64-f849263d5a85
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Publication Year
2005
Research Group
OLD Surface and Interface Engineering
Issue number
7
Volume number
97
Pages (from-to)
073508-1-073508-4
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