Stress in sputter-deposited Cr films: Infleunce of ar pressure

Journal article (2005)

Authors

S Grachev OLD Surface and Interface Engineering
F.D. Tichelaar QN/High Resolution Electron Microscopy
G.C.A.M. Janssen OLD Surface and Interface Engineering
Research Group
OLD Surface and Interface Engineering
More Info
expand_more

Published Date

2005

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

OLD Surface and Interface Engineering