Transport-based dopant metrology in advanced FinFETs

Conference paper (2008)

Authors

GP Lansbergen QN/Photronic Devices
R Rahman Data-Intensive Systems - EEMCS
CJ Wellard External organisation
J. Caro-Schuurman QN/Photronic Devices
N Collaert External organisation
S Biesemans External organisation
G Klimeck External organisation
L.C.L Hollenberg External organisation
S. Rogge QN/Photronic Devices
Research Group
QN/Photronic Devices
More Info
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Published Date

2008

Language

Undefined/Unknown

Reuse Rights

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Research Group

QN/Photronic Devices