Transport-based dopant metrology in advanced FinFETs
Conference Paper
(2008)
Author(s)
GP Lansbergen (TU Delft - QN/Photronic Devices)
R Rahman (TU Delft - Data-Intensive Systems)
CJ Wellard (External organisation)
Jaap Caro (TU Delft - QN/Photronic Devices)
N Collaert (External organisation)
S Biesemans (External organisation)
G Klimeck (External organisation)
L.C.L Hollenberg (External organisation)
S. Rogge (TU Delft - QN/Photronic Devices)
Research Group
QN/Photronic Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:d3403eaf-d72f-4fd6-b5bc-cdb419b5344f
More Info
expand_more
expand_more
Publication Year
2008
Research Group
QN/Photronic Devices
Bibliographical Note
Nog niet eerder opgevoerd@en
Pages (from-to)
713-716
ISBN (print)
978-1-4244-2377-4
No files available
Metadata only record. There are no files for this record.