Transport-based dopant metrology in advanced FinFETs

Lansbergen, GP; Rahman, R; Wellard, CJ; Caro, J.; Collaert, N; Biesemans, S; Klimeck, G; Hollenberg, L.C.L; Rogge, S.

Transport-based dopant metrology in advanced FinFETs

Conference paper (2008)

Authors

GP Lansbergen QN/Photronic Devices

R Rahman Data-Intensive Systems

CJ Wellard External organisation

J. Caro QN/Photronic Devices

N Collaert External organisation

S Biesemans External organisation

G Klimeck External organisation

L.C.L Hollenberg External organisation

S. Rogge QN/Photronic Devices

Research Group

QN/Photronic Devices

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Published Date

2008

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Research Group

QN/Photronic Devices

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