Comparison of numerical methods for transient CVD simulations

Journal Article (2007)

Author(s)

S van Veldhuizen (TU Delft - Numerical Analysis)

Kees Vuik (TU Delft - Numerical Analysis)

CR Kleijn (TU Delft - MSP/Thermal & Materials Processes)

Research Group

Numerical Analysis

CWTS 0.75 <= JFIS < 2.00 Techniek Wiskunde en Informatica Technische Wiskunde en Informatica

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Publication Year

2007

Research Group

Numerical Analysis

Volume number

201

Pages (from-to)

8859-8862

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