Transamination in pulsed DC-plasma enhanced CVD of Ti(C,N) from TDMAT.

Driessen, J.; Kuypers, AD; Schoonman, J

Transamination in pulsed DC-plasma enhanced CVD of Ti(C,N) from TDMAT.

Conference paper (1999)

Authors

J. Driessen External organisation

AD Kuypers External organisation

J Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

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Published Date

1999

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

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