Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition
Cristiano Glessi (Universitetet i Oslo)
A.M.I.M. Mahgoub (TU Delft - ImPhys/Microscopy Instrumentation & Techniques)
CW Hagen (TU Delft - ImPhys/Microscopy Instrumentation & Techniques)
Mats Tilset (Universitetet i Oslo)
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Abstract
Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or iPr), and of the ancillary ligand X (Cl, Br, I, or CF3). The seven complexes were tested as FEBID precursors in an on-substrate custom setup. The effect of the substitutions on deposit composition and growth rate indicates that the most suitable organic ligand for the gold precursor is triazole-based, with the best deposit composition of 15 atom % gold, while the most suitable anionic ligand is the trifluoromethyl group, leading to a growth rate of 1 × 10−2 nm3/e−.
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