Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations
Journal Article
(2012)
Author(s)
WM van Spengen (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
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https://resolver.tudelft.nl/uuid:d4a813e6-b7d0-47e3-8135-745bb6576e6f
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Publication Year
2012
Language
English
Research Group
Micro and Nano Engineering
Issue number
7
Volume number
22
Pages (from-to)
1-23
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