PECVD Si layers grown in layer by layergrowth mode

Report (2003)

Authors

F.D. Tichelaar QN/High Resolution Electron Microscopy
T.R. de Kruijff QN/High Resolution Electron Microscopy
Research Group
QN/High Resolution Electron Microscopy
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Published Date

2003

Language

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Research Group

QN/High Resolution Electron Microscopy