CMOS-compatible wells for integrated high-speed screening arrays

Conference paper (2002)

Authors

BL Gray ImPhys/Quantitative Imaging

R Moerman ImPhys/Quantitative Imaging

LR van den Doel ImPhys/Quantitative Imaging

H.R.C. Dietrich ImPhys/Quantitative Imaging

VP Iordanov ImPhys/Quantitative Imaging

NP Pham Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

A. Bossche Electronic Instrumentation -

MJ Vellekoop Electronic Instrumentation -

Research Group

ImPhys/Quantitative Imaging

To reference this document use:

http://resolver.tudelft.nl/uuid:d50270b1-b6ba-45e3-a46c-b9038339d367

More Info

expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Quantitative Imaging

Abstract

This paper explores the use of photo patternable polymers for integrated high-speed screening arrays, where enzyme reactions are monitored in nano liter volume reactors using fluorescence of NADH and photodiode detection. Implementing the array of nano liter volume wells using a low-temperature CMOS-compatible process allows wells to be patterned after the photodiode array and electronics fabrication is completed. We demonstrate filling of 400 $MUL 400 micron square, 25 micron deep photoresist-on-silicon wells with liquid samples by electro spray and wetting. We also demonstrate usability of the wells on NADH samples by measuring the fluorescence of 0.1, 0.5 and 1 millimolar NADH solutions using external optics.