Amplitude and phase beam shaping for highest sensitivity in sidewall angle detection

Journal Article (2017)
Author(s)

Luca Cisotto (TU Delft - ImPhys/Optics)

H. Paul Urbach (ITMO University, TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1364/JOSAA.34.000052
More Info
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Publication Year
2017
Language
English
Research Group
ImPhys/Optics
Issue number
1
Volume number
34
Pages (from-to)
52-60

Abstract

In integrated circuits manufacturing, specific structures are used as tools to evaluate the quality of the lithographic process, and the shape of these structures is often described by a few parameters, of which in particular the sidewall angle suffers from considerable inaccuracies. Using scalar diffraction theory, we investigate whether a properly shaped cylindrically focused probing beam could increase the ability to detect tiny changes in this angle in the case of a cliff-like structure, modeled as a phase object. This paper describes the theoretical formulation used to calculate the optimized beam and compares its performance with the case of a focused plane wave.

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