Nebula

Monte Carlo simulator of electron–matter interaction

Journal Article (2020)
Author(s)

L. Van van Kessel (TU Delft - ImPhys/Microscopy Instrumentation & Techniques)

Cornelis Wouter Hagen (TU Delft - ImPhys/Microscopy Instrumentation & Techniques)

Research Group
ImPhys/Microscopy Instrumentation & Techniques
Copyright
© 2020 L.C.P.M. van Kessel, C.W. Hagen
DOI related publication
https://doi.org/10.1016/j.softx.2020.100605
More Info
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Publication Year
2020
Language
English
Copyright
© 2020 L.C.P.M. van Kessel, C.W. Hagen
Research Group
ImPhys/Microscopy Instrumentation & Techniques
Volume number
12
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Abstract

Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used. We present an open-source software package with first-principle physical models, which can run on GPUs for fast results. Typical electron microscope images can be obtained in minutes instead of hours on consumer-grade hardware, without any loss of accuracy.