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Monte Carlo simulator of electron–matter interaction

Journal article (2020)

Authors

L.C.P.M. van Kessel ImPhys/Microscopy Instrumentation & Techniques - AS
C.W. Hagen ImPhys/Microscopy Instrumentation & Techniques - AS
Research Group
ImPhys/Microscopy Instrumentation & Techniques (AS) (TU Delft)
Copyright: © 2020 L.C.P.M. van Kessel, C.W. Hagen
DOI
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https://doi.org/10.1016/j.softx.2020.100605
SEM Monte Carlo simulation Metrology GPU Lithography Electron scattering
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Published Date

2020

Language

English

Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Microscopy Instrumentation & Techniques

Abstract

Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used. We present an open-source software package with first-principle physical models, which can run on GPUs for fast results. Typical electron microscope images can be obtained in minutes instead of hours on consumer-grade hardware, without any loss of accuracy.