Integration of a high-NA light microscope in a scanning electron microscope
Journal Article
(2013)
Author(s)
A.C. Zonnevylle (TU Delft - ImPhys/Charged Particle Optics)
RFC van Tol (External organisation)
N Liv Hamarat (TU Delft - ImPhys/Charged Particle Optics)
AC Narvaez (External organisation)
APJ Effting (External organisation)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Jacob Hoogenboom (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:d5b2b7f5-ecb8-468d-aa16-1fee40b5a093
More Info
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Publication Year
2013
Research Group
ImPhys/Charged Particle Optics
Issue number
1
Volume number
252
Pages (from-to)
58-70
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