Stress gradients in titanium nitride thin films
Journal Article
(2008)
Author(s)
R Machunze (TU Delft - OLD Surface and Interface Engineering)
Guido Janssen (TU Delft - OLD Surface and Interface Engineering)
Research Group
OLD Surface and Interface Engineering
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Publication Year
2008
Research Group
OLD Surface and Interface Engineering
Volume number
203
Pages (from-to)
550-553
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