Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.

Conference paper (2001)

Authors

D Munteanu External organisation

N van Landschoot Old - sect Laboratory Inorganic Chemistry (DCT/AC)

J. Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)

A Munteanu External organisation

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:d66190b3-ae94-4ef6-b727-f1484e4b8aec

Published Date

2001

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)