Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.
Conference Paper
(2001)
Author(s)
D Munteanu (External organisation)
N van Landschoot (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))
J. Schoonman (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))
A Munteanu (External organisation)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Publication Year
2001
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Pages (from-to)
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