A Complete Overview on Realizing Transfer-free Graphene-based Differential Pressure Sensor
R. Ramesha (TU Delft - Electrical Engineering, Mathematics and Computer Science)
Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)
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Abstract
Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this work we employed a novel, transfer-free bulk-micromachining approach to realize graphene-based differential pressure sensors. The devices were successfully fabricated, and the samples were examined under Raman Spectroscopy, and electrically characterized. Further, pressure dependent measurements were performed for a dynamic range of 0 to 80 kPa of differential pressure and the corresponding change in resistance of the membrane was measured. The fabricated devices have a mean Gauge Factor of 2.80.