The role of secondary electrons in Electron-Beam-Induced-Deposition spatial resolution

Journal Article (2002)
Author(s)

N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2002
Research Group
ImPhys/Charged Particle Optics
Volume number
61-62
Pages (from-to)
693-699

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