The role of secondary electrons in Electron-Beam-Induced-Deposition spatial resolution
Journal Article
(2002)
Author(s)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:d946d6b3-6ef1-45fa-af7c-e8ffc267b27f
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Publication Year
2002
Research Group
ImPhys/Charged Particle Optics
Volume number
61-62
Pages (from-to)
693-699
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