Ion Beams in SEM: An experiment towards a high brightness low energy spread electron impact gas ion source
Journal Article
(2011)
Author(s)
D.S. Jun (TU Delft - ImPhys/Charged Particle Optics)
VG Kutchoukov (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:d9db137e-555d-42b1-9142-f062f5d62bb1
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Publication Year
2011
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
29
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