Electrical behaviour of mono-Si based microhotplate heater
Conference Paper
(2008)
Author(s)
M Mihailovic (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Old - EWI Sect. ECTM)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:da47349a-7713-4164-b497-e0e08c4755d1
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
411-414
ISBN (print)
978-90-73461-56-7
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