Electrical behaviour of mono-Si based microhotplate heater

Mihailovic, M; Creemer, J.F.; Sarro, PM

Electrical behaviour of mono-Si based microhotplate heater

Conference paper (2008)

Authors

M Mihailovic Electronic Components, Technology and Materials

J.F. Creemer Old - EWI Sect. ECTM

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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